Chen Shirley
Reporting Owner SEC Filing List

CIK: 0002074793
Form Filer Subject Company Filing Agent Date Actions
4Statement of changes in beneficial owner...Onto Innovation Inc. 03/04/2026
4Statement of changes in beneficial owner...Chen Shirley 03/04/2026
4Statement of changes in beneficial owner...Onto Innovation Inc. Burke Jacob /fa 09/03/2025
4Statement of changes in beneficial owner...Chen Shirley Burke Jacob /fa 09/03/2025
3Initial statement of beneficial ownershi...Onto Innovation Inc. Burke Jacob /fa 06/30/2025
3Initial statement of beneficial ownershi...Chen Shirley Burke Jacob /fa 06/30/2025

Chen Shirley 's Ownership Transactions

Issuer Filing
Date
Transaction
Date
Transaction
Type
Shares Price Total Amt Shares Owned